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  • Material and Device Examination:

    • Atomic Force Microscope

    • Two probe stations with Bausch-Lomb microscopes and Wentworth high frequency probes, one with automatic positioners with a temperature-controlled stage.

     

  • Optical Communications and Device Testing:

    • Three optical spectrum analyzers (one high resolution Ando 6317B, one Agilent 86146B)

    • Two wavelength meters

    • Lightwave signal analyzer (HP 71401c for up to 2.9 GHz, and HP 71400c up to 20 GHz);

    • Tunable laser sources (three 8164A mainframes with 81682A tunable C-band plug-ins). Anristu 12.5 Gb/s Bit Error Rate Test-set

    • 40 GHz sampling oscilloscope

    • Nortel OpTera OC-192 switches

    • Ability to generate signals up to 60 GHz (using the HP 8341B frequency multiplier unit with HP83554a and HP83556a modules for 26.5-40 GHz and 40-60 GHz respectively)

    • HP 8349b 20 GHz microwave amplifier,

    • Tektronics 494p electrical spectrum analyzer (0-21 GHz), which can be extended with waveguide mixers up to 325 GHz (currently have WM490K for 18-26.5 GHz, and WM490A for 26.5-40 GHz

    • Small-signal frequency response analysis using the Agilent 8510c 0-50 GHz Vector Network Analyzer, and optical heterodyne techniques developed for frequencies up to 70 GHz.

     

  • Material Synthesis and Device Fabrication (Nanofabrication Facility in AMPEL):

    • Scanning Electron Microscope

    • Electron Beam writing

    • Photoresist spinner

    • 3 inch and 4 inch mask aligner

    • Sputter evaporation

    • E-Beam evaporation

    • ECR plasma etcher

    • PECVD

    • Rapid Thermal Anneal (RTA)

    • N2 Purge oven

    • Alpha-step profilometer

    • Wirebonder

 

     

 
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Last reviewed 12-May-2005
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